CVD tube furnace system for graphene growth

Description：

This system is a special dual-tube CVD system, which is specially designed for growing thin films on metal foils, especially applied to the research on flexible metal foil electrodes of the new generation of energy.

Product introduction:
This system is a special dual-tube CVD system, which is specially designed for growing thin films on metal foils, especially applied to the research on flexible metal foil electrodes of the new generation of energy. The sliding furnace can realize rapid heating and cooling of materials.

Technical parameter:

Part 1: 1200°C double tube double temperature zone tube furnace
Model	KJ-TCVD1100-S100LK2W
Furnace tube size	Double quartz tube Outer tube: OD 100 x ID 96 x 1400 mm Inner tube: OD 80 x ID 75 x 1800 mm Customizable according to customer needs (Φ50, 60, 80, 100, 150mm available)
Heating zone	2 Zone(220+220mm) Customizable according to customer needs
Heating element	Resistance wire
Heating rate	0-20°C/min
Thermocouple	N type
Part 2: Water cooling system
Flange	1. Water chiller 2. Water-cooled, sealed double-tube vacuum flange: Allow reaction gas to react between the two tubes (10mm gap), and the cooling gas is directly passed into the inner tube.
Part 3: Vacuum System
Vacuum system	1. Anticorrosive digital display vacuum gauge 2. Rotary vane pump, pumping speed 4L/S, including flapper valve KF25 interface, bellows and box
Part 4: Air Mixing System
Mass flowmeter Range: MFC 1: 0~10 sccm MFC 2: 0~200 sccm MFC 3: 0~10 slm MFC 3: 0~10 slm .......

Our company has the ability to independently develop, design, produce and process, and our machines provide lifetime parts replacement and upgrade services.

This model RTP slide rail CVD equipment is a customized equipment according to customer requirements, consisting of a slide rail tube furnace, a vacuum system and a gas system, which can be used for laboratory sintering, annealing, vacuum coating, and atmosphere environment sintering experiments.

Main functions and features:
1. The heating tube furnace uses infrared lamps to heat the heating elements, which can meet the experimental requirements of different heating rates. The furnace insulation material uses polycrystalline fiber material, which has good insulation performance, durability, high tensile strength, no impurities, high purity, and energy-saving effect is significantly better than domestic fiber materials.
2. The entire furnace body adopts a double-layer liner structure with an air gap in the middle. Even if the furnace temperature is as high as 1100℃, the surface of the furnace body can still be safely touched without a hot feeling.
3. The furnace tube uses quartz furnace tube, which is resistant to extreme cold and heat.
4. The temperature control system adopts touch screen operation, artificial intelligence adjustment, PID adjustment, self-tuning function, 30 sections of temperature rise and fall programs can be compiled, and data can be stored and output.
5. The high vacuum system is composed of molecular pumps, the ultimate vacuum degree can reach 5x10-3pa, and the composite digital display vacuum gauge is displayed.
6. The gas path system is composed of two mass flow meters, flow display instruments, etc., to achieve precise measurement and control of gas flow.
7. With over-temperature alarm protection function, the operation is safe and reliable.